| 20120113247 | Lighting Device For Alignment And Exposure Device Having The Same - A ring shape lighting device, used for lighting the mark around the CCD camera, has a lighting device, a lighting brightness control device, a lighting height control device, a lighting color control device and a controller. The controller controls these devices and detects the marks using the CCD camera, by changing the lighting brightness at 1 percent step from 1 to 100 percent with different combinations of lighting height and lighting color. The device detects the mark contrasts using a contrast detection/determination device and detects the variance using a variance detection/determination device. The device then determines the best lighting condition based on the variance. | 05-10-2012 |
