| ADIXEN VACUUM PRODUCTS Patent applications |
| Patent application number | Title | Published |
|---|
| 20120090382 | DEVICE AND METHOD FOR ANALYSING GAS AND ASSOCIATED MEASUREMENT STATION - The invention relates to a station for measuring gaseous pollution in a transport enclosure of semiconductor substrates comprising a gas analysis device for determining the concentration of the gas to be analysed, said analysis device including: a diluting unit ( | 04-19-2012 |
| 20120088031 | GAS DISCHARGE PIPE AND ASSOCIATED METHOD - The embodiments of the present invention describe a gas discharge pipe comprising a first discharge channel and at least one second discharge channel designed to be connected respectively to a first vacuum pump and to at least a second vacuum pump on the one hand and to a reactor outlet on the other hand, in which the first discharge channel and at least the second discharge channel comprise first means and at least second means for injecting an inert gas in which the direction of injection is respectively oriented opposite to the direction of suction of the vacuum pumps. | 04-12-2012 |
| 20120024394 | METHOD FOR LOWERING THE PRESSURE IN A LOAD LOCK AND ASSOCIATED EQUIPMENT - The invention relates to a method for lowering the pressure in a device charge-discharge lock from atmospheric pressure to a sub-atmospheric transfer pressure, said lock comprising a chamber in which at least one substrate is arranged at atmospheric pressure, said method comprising: a first step ( | 02-02-2012 |
| 20120003105 | DRY VACUUM PUMP - The invention pertains to a dry-type vacuum pump comprising:
| 01-05-2012 |
| 20110315875 | IONIZATION CELL FOR A MASS SPECTROMETER, AND CORRESPONDING LEAK DETECTOR - An ionization cell for a mass spectrometer ( | 12-29-2011 |
| 20110295528 | DEVICE FOR MEASURING AND PROCESSING A HIGH DYNAMIC INPUT SIGNAL, AND CORRESPONDING LEAK DETECTOR AND MEASURING AND PROCESSING METHOD - The invention relates to a device for measuring and processing an input signal (To) of at least two decades, comprising: an electron multiplier ( | 12-01-2011 |
