OERLIKON LEYBOLD VACUUM GMBH Patent applications |
Patent application number | Title | Published |
20140369809 | TURBOMOLECULAR PUMP - A turbomolecular pump has a rotor element in a housing. The rotor element is arranged on a rotor shaft. The rotor shaft is supported by two bearing elements in the housing. The bearing element on the high-vacuum side is constructed as a roller bearing. In order to guarantee a pressure in the area of the bearing element that is acceptable for the bearing element constructed as a roller bearing, the bearing element is arranged in a chamber. The chamber is connected via a channel to the pre-vacuum area and sealed relative to the high-vacuum area by a gasket. | 12-18-2014 |
20130251578 | ROTARY VACUUM PUMP WITH A DISCHARGE COMPENSATING CHANNEL - A rotary vacuum pump includes a suction chamber ( | 09-26-2013 |
20120144789 | MULTISTAGE OIL SEPARATOR - In order to provide an improved multistage oil separator, in particular for the use with compressors in cryogenics, the oil separator includes a housing ( | 06-14-2012 |
20120087776 | MULTI-INLET VACUUM PUMP - A multi-inlet vacuum pump has a first pump device ( | 04-12-2012 |
20120063917 | ROUGHING PUMP METHOD FOR A POSITIVE DISPLACEMENT PUMP - In order to provide a simple and energy-efficient rough pumping method for a displacement pump ( | 03-15-2012 |
20110311348 | MULTI-INLET VACUUM PUMP - A multi-inlet vacuum pump includes a first pump device ( | 12-22-2011 |
20110255999 | USE OF A ROLLING-ELEMENT BEARING FOR BEARING ROTATING COMPONENTS IN VACUUM DEVICES AND VACUUM DEVICE - A rolling-element bearing for bearing rotating components in vacuum devices includes a plurality of rolling elements ( | 10-20-2011 |
20110232689 | METHOD FOR CLEANING A VACUUM PUMP - A method for cleaning a vacuum pump ( | 09-29-2011 |
20110197659 | METHOD FOR DETERMINING AN OVERALL LEAKAGE RATE OF A VACUUM SYSTEM AND VACUUM SYSTEM - An overall leakage rate of a vacuum system which can be operated continuously or cyclically is determined. The vacuum system includes at least one process chamber ( | 08-18-2011 |
20110150629 | STATOR-ROTOR ARRANGEMENT FOR A VACUUM PUMP AND VACUUM PUMP - A stator-rotor arrangement for a vacuum pump, in particular for a turbomolecular pump, includes a plurality of stator disks ( | 06-23-2011 |
20110129374 | VACUUM PUMP IN PARTICULAR ROOTS TYPE PUMP - A vacuum pump, in particular a pump of the type with rolling bodies, includes rotary bodies ( | 06-02-2011 |
20110123358 | VACUUM PUMP - A vacuum pump, in particular a turbomolecular pump or a multi-inlet pump, includes a rotor shaft ( | 05-26-2011 |
20110123328 | VACUUM PUMP - A vacuum pump, particularly a turbomolecular pump or multi-inlet pump, comprises a rotor shaft ( | 05-26-2011 |
20110081231 | PUMP BEARING ARRANGEMENT - A pump bearing arrangement, suitable particularly for rapidly rotating pumps such as turbomolecular pumps, comprises a pump rotor ( | 04-07-2011 |
20110046897 | METHOD FOR DETERMINING THE FATIGUE OF A PUMP ROTOR OF A GAS TURBOPUMP - A method for determining the fatigue of the pump rotor of a gas turbopump comprises the following method steps:
| 02-24-2011 |
20100322798 | RAPIDLY ROTATING VACUUM PUMP - A rapidly rotating vacuum pump includes: a magnet-mounted rotor driven by an electric drive motor with a predetermined constant nominal rotational frequency (f | 12-23-2010 |
20100303653 | TURBOMOLECULAR PUMP - A turbomolecular pump ( | 12-02-2010 |
20100303650 | CURRENT LEADTHROUGH FOR A VACUUM PUMP - The vacuum pump comprises a casing ( | 12-02-2010 |
20100290915 | MULTI-STAGE PUMP ROTOR FOR A TURBOMOLECULAR PUMP - A multi-stage pump rotor ( | 11-18-2010 |
20100260594 | VACUUM LINE - A vacuum line ( | 10-14-2010 |
20100202880 | COATING FOR GAS BEARING - The invention relates to a vacuum pump in which the gas bearing is coated with a hard layer, and to a process for preparing such gas bearing of a vacuum pump. | 08-12-2010 |
20100199495 | PROCESS FOR PREPARING ROTORS OR STATORS OF A TURBOMOLECULAR PUMP - The invention relates to a process for preparing rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy. | 08-12-2010 |
20100196180 | VACUUM PUMP - A vacuum pump ( | 08-05-2010 |
20100187415 | TURBOMOLECULAR PUMP - A turbomolecular pump ( | 07-29-2010 |
20100176294 | MASS SPECTROMETER ARRANGEMENT - The invention refers to a mass spectrometer arrangement ( | 07-15-2010 |
20100086883 | METHOD FOR REACTING SELF-IGNITING DUSTS IN A VACUUM PUMP DEVICE - Into a vacuum pump device arranged for suctional intake of a process gas ( | 04-08-2010 |
20100072845 | METHOD FOR DETERMINATION OF RESONANT FREQUENCIES OF A ROTOR USING MAGNETIC BEARINGS - The resonant frequencies of a rotor supported on magnetic bearings, in particular a rotor of a turbomolecular vacuum pump, are determined. While the rotor is stationary or the rotor is rotating at a relatively low rotation frequency, mechanical oscillations of the rotor are generated by electromagnets in the magnetic bearing. The rotor oscillations are detected by rotor-position sensors in the magnetic bearing. The resonant frequencies of the rotor are determined from the detected rotor-position oscillations. | 03-25-2010 |
20100054957 | METHOD FOR DETERMINING A STATEMENT OF A STATE OF A TURBOMOLECULAR PUMP AND A TURBOMOLECULAR PUMP - In a method for determining a statement of a state of a turbomolecular pump, and in a turbomolecular pump, a vibration curve is determined with a vibration sensor ( | 03-04-2010 |
20100047095 | VACUUM PUMP - A vacuum pump ( | 02-25-2010 |
20090068451 | COATED ARTICLES - The invention relates to a process for the coating of objects made of valve metals selected from aluminum, magnesium, titanium, niobium and/or zirconium and their alloys with an oxide ceramic layer formed from the metal which has a thin barrier layer as a boundary layer towards the metal whose surface has been coated with polymers, characterized in that said polymers are introduced into the capillary system of the oxide ceramic layer in the form of dimers or halogenated dimers of general formula I | 03-12-2009 |