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XACTIX, INC.
PITTSBURGH, PA US
1. 20090233449 ETCHING CHAMBER WITH SUBCHAMBER - apparatus for etching a semiconductor wafer or sample the semiconductor wafer or sample is placed on a sample holder 09-17-20092. 20090065477 PULSED-CONTINUOUS ETCHING - system and method of etching a sample disposed in an etching chamber a plurality of separately stored charges of an etching 03-12-2009
3. 20080207001 Pulsed Etching Cooling - apparatus and method of vapor etching, a sample to be etched is located in a main chamber from which the atmosphere inside is 08-28-2008