MIRAIAL CO., LTD Patent applications |
Patent application number | Title | Published |
20140138279 | SUBSTRATE STORING CONTAINER - A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door. | 05-22-2014 |
20130056388 | Substrate Storage Container - The position of a substrate temporal placement piece ( | 03-07-2013 |
20130037444 | Substrate Storage Container - When a lid ( | 02-14-2013 |
20120312720 | Semiconductor Wafer Storing Container - The dimensions of the deformation margins (Xh, Xp) of a gasket ( | 12-13-2012 |
20120043254 | SEMICONDUCTOR WAFER CONTAINER - Wafer protecting grooves ( | 02-23-2012 |
20110042266 | WAFER CONTAINER WITH CUSHION SHEETS - An elastic wafer-retaining cushion sheet is disposed at a wafer retaining position on the top of a wafer tray. The wafer-retaining cushion sheet has a releasably suction-adhering surface that releasably adheres by suction to the wafer tray. Consequently, there is no likelihood of the semiconductor wafer being damaged during transport or the like. In addition, the wafer-retaining cushion sheet can be readily attached to and detached from the wafer tray for washing or replacement according to need. | 02-24-2011 |
20100276324 | Thin Plate Container - A thin board container is composed of a tray storing body for stacking a plurality of placing trays which can be removed from each other, and storing semiconductor wafers by sandwiching the semiconductor wafers in spaces between the placing trays; and an external container for storing the tray storing body inside. At the both facing side ends of each placing tray, a pair of holding sections wherein the processing arms of an external mechanical device fit for holding the tray are arranged. The external container is provided with a container main body; a cover body; and a sealing material arranged between the cover body and the container main body for sealing the inside; a pair of tray storing body supporting sections for supporting the tray storing body; and a tray storing body holder for supporting the tray storing body stored in the container main body by holding the tray storing body from the bottom surface side and the cover body side. | 11-04-2010 |
20100051829 | Method for Putting Code Information on a Wafer Case - A laser light is irradiated on a wafer case made of polymer materials that have a high transparency to visible light and a low transparency to laser light having a wavelength other than the optical wavelength. The wafer case material in the irradiated portion foams, blackens, melts or evaporates by the irradiation. Thus, wafer case information can be marked by concavities and convexities or changing color formed on the wafer case surface. The wafer case information can be formed as a one-dimensional or two-dimensional code. Multiple laser lights can be irradiated on the same portion of the wafer case surface from different directions to the wafer case surface, and thus wafer case information is marked on only the neighborhood of the wafer case surface by foaming, blackening, melting or evaporating only the neighborhood of the wafer case surface that the laser light is irradiated on. | 03-04-2010 |
20100025277 | THIN PLATE STORAGE TRANSPORT SYSTEM AND RETICLE CASE USING THE SAME - A thin plate storage transport system including a pressure container for containing a thin plate provided with a container main body for containing one or a plurality of thin plates, a lid body attached by covering the container main body, and a seal for airtightly isolating a containing space formed inside from an outside environment when the container main body is closed and covered by the lid body; and a pressure supply device for setting a pressure inside the containing space at a set pressure higher than an outside pressure by supplying a pressure into the containing space of the pressure container for containing a thin plate. As a result, the inside of the containing space can be kept at high cleanliness for a long time. | 02-04-2010 |
20090297303 | Thin Plate Container and Processing Apparatus for Thin Plate Container - Arbitrary pieces of semiconductor wafers are supported flexibly on either the upper side or the lower side. The present invention is a thin plate container for supporting plural semiconductor wafers for use in carriage, storage, processing, etc. It comprises processing trays plurally stacked in a state of each supporting at least one semiconductor wafer individually and a coupling mechanism for integrally coupling the processing trays in a state where the processing trays are plurally stacked and separating the processing trays at an arbitrary location. Each processing tray has a one-side support for supporting at least one semiconductor wafer on its one side and the other-side support mutually fitted to the one-side support of the other processing tray on the other side to form a housing space sealed off from the external environment for constraining and supporting the thin plate. Accordingly, as many processing trays as the number of the semiconductor wafers are stacked to constitute the thin plate container. | 12-03-2009 |
20090266740 | WAFER CONTAINER WITH CUSHION SHEET - A wafer container with wafer-mounting cushion sheets prevents breaking and damage of semiconductor wafers due to impacts or repetitive warping by maintaining the semiconductor wafer in a flat state and enables the semiconductor wafer to be removed safely and easily without damage. The surface of each wafer-mounting cushion sheet includes a self-sucking portion for exerting a removable vacuum on the semiconductor wafer and a non-sucking portion for enabling separation of the semiconductor wafer. | 10-29-2009 |
20090250374 | SEMICONDUCTOR WAFER CONTAINER - A wafer-retaining unit ( | 10-08-2009 |
20090050518 | WAFER CONTAINER WITH CUSHION SHEETS - A wafer-retaining cushion sheet ( | 02-26-2009 |
20090038987 | Loading Tray and Thin Plate Container - A loading tray | 02-12-2009 |
20090009861 | Optical Sheet, Image Display Device, and Screen for Image Projector - An optical sheet of the present invention is constituted by a micro-lens array sheet formed with a flat face and a back face having micro lenses aligned laterally and longitudinally and an anisotropic light-absorbing sheet with different light absorbing properties depending on incident angle of incident light entering an incident face arranged oppositely and proximally to each other. The optical sheet may be constituted by the micro-lens array sheet, the anisotropic light-absorbing sheet, a pinhole array sheet and a light diffusing sheet arranged proximally in this order. In an image display device of the present invention, the optical sheet of the present invention is arranged proximally to a display face of an image display element. The anisotropic light-absorbing sheet of the present invention has through cavities surrounded by light-absorbing side walls mutually sharing the side walls and collected closely in a large number. | 01-08-2009 |